Method for injecting exotic atoms into a solid material with electron beams

摘要

A method for injecting exotic atoms into a solid material substrate (S,1) with electron beams (4) comprises irradiating a material having a layered structure including at least one thin film (F,2) adhered to a solid material substrate (S,1), with electron beams (4), and ejecting the exotic atoms out of the film (F,2) into an irradiation region of the substrate (S,1). This method gives desired forms such as crystalline, noncrystalline, or solid solution of the materials depending on the conditions of electron irradiation.