Method for determining the concentrations of gases in a gaseous mixture, and probe for measuring the thermal conductivity

摘要

The invention describes a method for determining the Gaskon concentrations in a gas mixture by measuring the Thermal conductivity of the gas mixture ness. The thermal conductivity of the gas mixture with N gas components is measured at N-1 gas temperatures. the individual gas concentrations are calculated from the measured thermal conductivity measurements.; A suitable sensor for measuring the thermal conductivity at various gas temperatures ver consists of a Si base plate (1) having been etched thin film resistors (5) on which a cover plate (2) rests. Both plates have in height of the thin film resistors etched pits (7a, 7b) which constitute the measuring chamber. Via a diffusion channel (8) and openings (11a, 11b), the gas to be determined mixture access to the measuring chamber.