Process of producing single crystalline LnA2Cu3O7-x thin films having three-layered perovskite structure

摘要

A thin film consisting of a single crystalline oxide of the formula:LnA₂Cu₃O_7-x      (I)wherein Ln is at least one of the rare earth elements Y, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm and Yb and A is at least one of the alkaline earth metals Ba, Sr and Ca which has a three-layered perovskite structure in which(1)the(001) plane,(2)the (110) plane or(3)the(103) planeof the crystal is parallel with the film surface is provi­ded.