Process of producing single crystalline LnA2Cu3O7-x thin films having three-layered perovskite structure

摘要

A thin film consisting of a single crystalline oxide of the formula: LnA2Cu3O7-x (I) wherein Ln is at least one of the rare earth elements Y, Nd, Sm, Eu, Gd, Dy, Ho, Er, Tm and Yb and A is at least one of the alkaline earth metals Ba, Sr and Ca which has a three-layered perovskite structure in which (1)the(001) plane, (2)the (110) plane or (3)the(103) plane of the crystal is parallel with the film surface is provided.