Process for the preparation of high-purity perfluorinated compounds, especially an aromatic tetracarboxylic acid and its anhydride, the 5,5 '- [2,2,2-trifluoro-1- (trifluoromethyl) -ethylidene] bis-1,3-isobenzofuranedione, by a multi-stage Treatment of raw compounds. The metal ion content of the treated compounds is significantly reduced. The anhydride is used in microelectronics after polymerization with an aromatic diamine.
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