A method of stabilizing the output of a gas discharge laser using an auxiliary electrode

摘要

The method for stabilizing the output power of the gas discharge laser using an auxiliary electrode to control the discharge current comprises following steps, (a) dividing a laser beam (2) with a photo divider (1); (b) detecting the divided laser beam or a part of laser beam reflected by a full reflection mirror (3) with a photo detector (4); (c) converting the fluctuation of the laser output to the variation of impedance of the discharge tube; and (d) controlling the voltage providing to the auxiliary electrode with a feedback controller (5).