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An electronic package comprising aluminum nitride and an aluminum nitride-borosilicate glass composite material,

机译:一种包含氮化铝和氮化铝-硼硅酸盐玻璃复合材料的电子封装,

摘要

An electronic package comprising dielectric layers including a densified aluminum nitride (AlN) base layer and at least one densified AlN-borosilicate glass composite layer bonded thereto is described. Any of the dielectric layers may be metallized with conductive circuit patterns and can contain conductive vias. Production of this package is accomplished by hot pressing a greenware laminate comprising a densified base (e.g., AlN); at least one green sinterable sheet (e.g., AlN-borosilicate glass composite); and a green sheet of non-sinterable material (e.g., boron nitride [BN]). The respective green sheets comprise homogeneous mixtures of the ceramic powders and a binder, e.g., polyethylene. The polyethylene is burnt off during the hot press operation. Residual BN is removed by brushing and/or grit blasting, leaving the finished electronic package, all ceramic elements of which are densified. The package provides superior thermal conductivity, strength, dielectric properties, and silicon-compatibility.
机译:描述了一种电子封装,其包括介电层,该介电层包括致密的氮化铝(AlN)基层和结合至其上的至少一个致密的AlN-硼硅酸盐玻璃复合层。任何介电层可以用导电电路图案金属化并且可以包含导电通孔。该包装的生产是通过热压包含致密化的基底(例如AlN)的生坯层压板来完成的;至少一层生坯可烧结片(例如,AlN-硼硅酸盐玻璃复合材料);以及不可烧结材料的生片(例如氮化硼[BN])。各个生坯片包括陶瓷粉末和粘合剂例如聚乙烯的均质混合物。聚乙烯在热压过程中被烧掉。通过刷洗和/或喷砂去除残留的氮化硼,留下成品的电子封装,其所有陶瓷元件均被致密化。该封装具有出色的导热性,强度,介电性能和硅兼容性。

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