INTERFEROMETER FOR CHECKING RECTILINEARITY OF OBJECTS

摘要

the invention u043fu043eu0437u0432u043eu043bu00a0u0435u0442 control linear u0441u043cu0435u0449u0435u043du0438u00a0 object on the reference u043du0430u043fu0440u0430u0432u043bu0435u043du0438u00a0 and deviation from the u043fu0440u00a0u043cu043eu043bu0438u043du0435u0439u043du043eu0441u0442u0438 object. purpose u0438u0437u043eu0431u0440u0435u0442u0435u043du0438u00a0 u00a0u0432u043bu00a0u0435u0442u0441u00a0 sensation by u0443u0432u0435u043bu0438u0447u0435u043du0438u00a0 difference the between u0438u043du0442u0435u0440u0444u0435u0440u0438u0440u0443u044eu0449u0438u043cu0438 bundles in the removal of u043eu0442u0440u0430u0436u0430u0442u0435u043bu00a0.u043du0430u043fu0440u0430u0432u043bu00a0u044eu0442 narrow beam of light from the laser 1 to a corner reflector 2, reflected by a mirror 3 through u0432u0432u043eu0434u00a0u0442 in nonlinear multiplier using two qi u043bu0438u043du0434u0440u0438u0447u0435u0441u043au0438u0445 mirrors 4, which converts the linear u0441u043cu0435u0449u0435u043du0438u00a0 beam at its entrance in the corner on its withdrawal. the beam, the nonlinear multiplier, u0434u0435u043bu00a0u0442 u0441u0432u0435u0442u043eu0434u0435u043bu0438u0442u0435u043bu0435u043c 5 u0434u0432u0443u0445u043bu0443u0447u0435u0432u043eu0433u043e u0438u043du0442u0435u0440u0444u0435u0440u043eu043cu0435u0442u0440u0430.in one of the two branches of the u0438u043du0442u0435u0440u0444u0435u0440u043eu043cu0435u0442u0440u0430 divided beam of light is passed through u043fu043bu043eu0441u043au043eu043fu0430u0440u0430u043bu043bu0435u043bu044cu043du0443u044e plate 8, u043au043eu0442u043eu0440u0430u00a0 changes the difference of between separate bundles, subject to the availability of u043eu0442u043au043bu043eu043du0435u043du0438u00a0 beam at its entrance. u043fu0435u0440u0435u043eu0442u0440u0430u0436u0435u043du043du044bu0435 beams from the end reflectors 6, 7 in both u0432u0435u0442u0432u00a0u0445 u0438u043du0442u0435u0440u0444u0435u0440u043eu043cu0435u0442u0440u0430 stacked on the u0441u0432u0435u0442u043eu0434u0435u043bu0438u0442u0435u043bu0435 5.u0440u0435u0437u0443u043bu044cu0442u0438u0440u0443u044eu0449u0443u044e interfere matching picture design on the recorder 9, which provides the number of fringe size bands, passed through the entrance, and the number of fringe size of u0441u0443u0434u00a0u0442 linear displacement of the object along the axis direction of a laser beam u043fu0435u0440u043fu0435u043du0434u0438u043au0443u043bu00a0u0440u043du043eu0439. 3).