Magnetron vaporising system - includes magnetic circuit in plasma-producing vaporiser giving more even target consumption in plasma-coating system

摘要

The vaporiser contains an electromagnet having at least two vertical cores arranged a set distance from each other. Magnetically conducting extensions are connected to the forward ends of the cores. A thermally conductive support plate for the target material is welded to the inside of these extensions at a fixed distance from their top surface. The ferromagnetic target material is fixed to this support plate such that it is inside the extensions and a certain clearance exists between it and the extension surfaces. Pole pieces project horizontally from these extensions and cover the above clearance space. This arrangement produces a magnetic field approximately parrallel to the surface of the target material. USE/ADVANTAGE - In systems for depositing a coating on components which are connected as anodes in a vacuum chamber in which a plasma is created by vaporising a target material. The proposed arrangement of the vaporising device provides a more even consumption of the target material and hence a longer interval between required changes of target.