Patterning thin film superconductors using focused beam techniques

摘要

Patterned films of superconducting materials are formed using focused beam techniques, such as electron beam, ion beam, and laser beam techniques. A solution comprising the neodecanoates of yttrium, barium, and copper is formed which is soluble in an organic solvent. The solution is spun onto an appropriate substrate. The solution is dried and subsequently selectively exposed using focused beam techniques, so that the exposed regions are no longer soluble in the organic solvent. The solution is immersed in the organic solvent, so that the only the exposed, insoluble regions remain on the substrate. The solution is then heated at a temperature sufficient to decompose the neodecanoates, about 500. degree. C., and then heated again, preferably using rapid thermal annealing techniques, to promote recrystallization and grain growth of the remaining metal oxides. The resulting patterned film exhibits superconductive characteristics.