METHOD AND APPARATUS FOR JUDGING ACCEPTANCE OF MEASURED SAMPLE

摘要

PURPOSE:To judge acceptance of a measured sample accurately and quickly by a single measuring operation by comparing a measured value at each step corresponding to set conditions with a reference value sequentially in a series of characteristic data obtained from results of measurement. CONSTITUTION:Information for start of comparison is inputted from a switch section 53 and when need is determined, a control section 52 picks up measuring conditions of a step 1 to be set for a signal oscillating section 12, an AMP section 13 and a measuring circuit section 14 which upper and lower limit values are set for a comparison section 32 corresponding to the step 1. Then, a switch SW2 is closed at a scanning section 21 and a measurement by comparison is performed according to the set conditions. Thereafter, the same processing is performed sequentially from a step 2 to a step 3. After the end of a series of processings for all steps, results of judgement are taken out for all steps already loaded into a memory to judge acceptance thereof through a judging section 35.