ALIGNING MECHANISM FOR OPTICAL AXIS AND X-RAY AXIS OF FLUORESCENT X-RAY FINE PART THICKNESS GAUGE

摘要

PURPOSE:To align the X-ray axis to the optical axis accuratly by photographing a XY sample table by a TV camera and setting the cursor of a display body at the boundary line of an optical-axis aligning body, and then opening a shutter and computing and displaying secondary data from the optical-axis aligning body. CONSTITUTION:Primary X rays radiated by an X-ray source 1 reach the XY sampel table 11 through a collimator 4 whtn the shutter 2 is opened, and are photographed by th TV camera 5 through a mirror 3 in the closed state and projected on the display body 8. The sample talbe 11 is moved to align the boundary line of the otpical axis aligning body 10 to the cursor 9 of the display body 8. Then, the shutter 2 is released, and then the primary X rays reach the optical axis aligning body 10, so that generated secondary X rays are detected by a secondary X-ray detector 6. The detected primary data are converted by a CPU7 into secondary data, which are display on the display body 8, so that the difference between the X-ray axis of the collimator and the optical axis of the TV camera is read on the display body 8. Thus, the X-ray axis is aligned to the optical axis.