PERPENDICULARLY MAGNETIC RECORDING MATERIAL AND MANUFACTURE THEREOF

摘要

PURPOSE:To obtain a perpendicularly magnetic recording material having a superior perpendicularly magnetizing film even when a base material is not heated by a method wherein the range of composition of the film to be expressed by (FexCoyNiz)1-mOm is specified. CONSTITUTION:A perpendicularly magnetizing film consisting of composition to be expressed by (FexCoyNiz)1-mOm, and in the range of 0=x=0.05, 0=z=0.40, 0.15=m=0.50 (provided that x+y+z=1) is provided. Moreover, Fe, Co, Ni atoms are evaporated as to be injected nearly perpendicularly to the surface of a non-magnetic base material (c) directly or interposing a soft magnetic thin film layer between the surface thereof, and at the same time, O2 gas is introduced to form the perpendicularly magnetizing film as mentioned above. For example, after the inside of a vessel 1 is evacuated up to 1X10-5Torr or less, O2 gas is introduced from a feed pipe 6 evaporating an Fe-Co-Ni alloy (d) of evaporating material at a fixed speed to form a perpendicularly evaporated film on the surface of the tape base material (c).