RECOVERING METHOD FOR HIGH-PURITY FINE AND SUPERFINE METALLIC AND CERAMICS POWDER

摘要

PURPOSE:To recover high-purity fine and superfine metallic or ceramics powder by previously removing metallic or ceramics particles having large particle diameter in the recovering stage of fine and superfine metallic or ceramics powder. CONSTITUTION:In the case of recovering fine and superfine metallic or ceramics powder which has been produced by vapor phase reaction of vapor of metallic halide., a U-tube and an obstacle or the like are provided between a reactor 1 and a recovery device 2. The aimed particles are produced in the reactor 1 but nonreacted halide remains and a by-product is produced. When the flow of gas is suddenly changed by the U-tube part, the nonreacted halide and the by-produce can be trapped in the U-tube by the difference of size and physical properties of the aimed particles, the nonreacted halide and the by-product. Accordingly high-purity fine and ultrafine metallic or ceramics powder recovered.