ELEMENT FOR WIND DIRECTION, SPEED, AND CAPACITY SENSOR AND WIND DIRECTION, SPEED, AND CAPACITY METER USING THE SAME

摘要

PURPOSE:To measure the direction and speed of a wind at the same time by forming many resistance thermometer bulbs at the outer periphery of the intermediate part of an insulating round rod at equal intervals and thin film electrodes which are connected to the resistance thermometer bulbs at their upper and lower outer peripheral parts. CONSTITUTION:The eight Pt resistance thermometer bulbs 2 which has 0.1mm width, 5mm length, and 3,000Angstrom thickness are formed by DC magnetron sputtering at 0.29mm intervals on the outer peripheral surface of the insulating round rod 1 of Al2O3 with a 1mm outside diameter and 30mm length by using a metal mask. Then the eight Pt thin film electrodes which has 0.2mm width, 13mm length, and 1mm thickness are formed at 0.19mm interval by the same method on the outer peripheral surfaces of both the upper and lower side parts of the round rod 1 and connected to both the upper and lower ends of the thermometer bulbs 2 to obtain the wind direction, speed, and capacity sensor 4. This is processed in the air at 1,200 deg.C for one hour and the values of the thermometer bulbs 2 are adjusted by a laser to 50OMEGA. Consequently, wire breaking and contacting between adjacent thermometer bulbs are eliminated and many resistance thermometer bulbs with high resistance are obtained, so the direction and speed of the wind are measured at the same time.