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Process for the deposition of a material on a eletrostatica substrto, and for the neutralizacao eletrostatica load resulting eletrostatica
Process for the deposition of a material on a eletrostatica substrto, and for the neutralizacao eletrostatica load resulting eletrostatica
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机译:在静电沉积物上沉积材料并中和静电沉积物的方法
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摘要
Apparatus (74) and method are provided for electrostatically depositing particles (64) of a first material onto a sheet (18) of a second material, and for electrostatically neutralizing the residual charge. The apparatus (74) includes a particle generator (20) for aspirating particles (64) of the first material, electrodes (60a and 60b) for electrostatically charging the particles (64) to a first polarity, an electrode (75) for electrostatically recharging a portion of the particles (64) to the opposite polarity, and a depositing chamber (22) for electrostatically depositing the particles of the opposite polarity subsequent to depositing the particles of the first polarity. IMAGE
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