Method for producing a piezo resistor strain gauge and an accelerometer with such a gauge

摘要

process for the manufacture of a rod on a side of a piu00e9zoru00e9sistive flexible beam of an accelerometer.;this process is to etch a substrate (22) perpendicular to its surface to form a recess (27) and (30) with the common iquant (24) which is able to move laterally to the flexible beam (26), a common area 2003 (32) representing the image of the rod (44) to achieve.to create a mask on the surface of the substrate (34) with an opening (36) located in the point of view of the course (30) extending partly over the beam to a beam through the opening (40) to form a deposition material (42). piu00e9z oru00e9sistif constituting the rod (44) and electrical contacts (46).the beam is oriented obliquely to the surface of the substrate, removing the mask and to electrical conductors on the upper side (36) and bottom (48) of the beam to power the fuel gauge.