Procedure and device for absolute interferometric testing of flat surfaces

摘要

The subject matter of the invention is a simple procedure and a device for absolute testing of flat surfaces. It provides that two flat surfaces (A6, B6) are introduced simultaneously with an oblique incidence into the measuring beam path of an interferometer. The interferograms which result for different incidence angles ( alpha 6, beta 6) and for shifting of the two flat surfaces are evaluated by computer. …IMAGE…