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PHOTORESIST COMPOSITIONS CONTAINING COBALT (III) COMPOUND AND REDOX TRANSFER LIGAND

机译:含钴(III)化合物和氧化还原转移配体的光致抗蚀剂组合物

摘要

An imaging negative-working composition suitable for use as a dry film resist, comprises a mixture of (a) a binder polymer, (b) a compound of Co (III) capable of partial reduction Co (II) upon exposure to activating radiation, and (c) a redox transfer ligand capable of reacting with Co (II) to form a chelate Co (II) reducing the compound of Co (III) remaining adjacent and forming a chelate Co (III) effective to impart differential solubility to the image composition. the composition can be exposed on an image to activating radiation such as a laser, heat, and developing with a developer to form a resist image in the exposed areas. An element comprising a support and a layer of the above composition is particularly useful in the manufacture of printed circuit boards by direct imaging laser.
机译:适用作干膜抗蚀剂的成像负性工作组合物,包括以下混合物:(a)粘合剂聚合物,(b)暴露于活化辐射后能够部分还原Co(II)的Co(III)化合物, (c)能够与Co(II)反应形成螯合物Co(II)的氧化还原转移配体,还原保留相邻的Co(III)的化合物并形成有效赋予图像不同溶解度的螯合Co(III)组成。该组合物可以在图像上曝光以活化辐射,例如激光,热,并用显影剂显影以在曝光区域中形成抗蚀剂图像。包括载体和具有上述组成的层的元件在通过直接成像激光制造印刷电路板中特别有用。

著录项

  • 公开/公告号EP0449969A1

    专利类型

  • 公开/公告日1991-10-09

    原文格式PDF

  • 申请/专利权人 EASTMAN KODAK COMPANY;

    申请/专利号EP19900901452

  • 发明设计人 DO MINH THAP;

    申请日1989-12-21

  • 分类号G03F7/038;H05K3/00;

  • 国家 EP

  • 入库时间 2022-08-22 05:52:27

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