APPARATUS FOR DETECTING OPTICAL SURFACE ROUGHNESS PARAMETERS BY DIFFERENTIAL LIGHT-DIFFUSION METHOD

摘要

the invention u043eu0442u043du043eu0441u0438u0442u0441u00a0 to the instrumentation technique. purpose u0438u0437u043eu0431u0440u0435u0442u0435u043du0438u00a0 u00a0u0432u043bu00a0u0435u0442u0441u00a0 greater accuracy and productivity u043eu043fu0440u0435u0434u0435u043bu0435u043du0438u00a0 parameters through direct u0438u0437u043cu0435u0440u0435u043du0438u00a0 intensity of u0438u0437u043bu0443u0447u0435u043d u0438u00a0, automation of the process of measurement and processing of the information received.through the discrete u0432u0440u0430u0449u0435u043du0438u00a0 model 26, located along the u0437u043eu043du0434u0438u0440u0443u044eu0449u0435u0433u043e u0438u0437u043bu0443u0447u0435u043du0438u00a0 laser 1, u043eu0441u0443u0449u0435u0441u0442u0432u043bu00a0u0435u043cu043eu0433u043e in plane and reflected from the surface of the the sample 26 rays, and fixation of u0434u0438u0444u0444u0443u0437u043du043e - reflected components u0438u0437u043bu0443u0447u0435u043du0438u00a0 u0444u043eu0442u043eu044du043bu0435u043au0442u0440u043eu043du043du044bu043c u0443u043cu043du043eu0436u0438u0442u0435u043bu0435u043c / u0444u044du0443 / 11 u0441u043du0438u043cu0430u0435u0442u0441u00a0 spectrum of differential light u0440u0430u0441u0441u0435u00a0u043du0438u00a0,u0438u043du0444u043eu0440u043cu0430u0446u0438u00a0 which does in the block 19 u0443u043fu0440u0430u0432u043bu0435u043du0438u00a0 and information processing. then, a sample of 26 u0443u0434u0430u043bu00a0u0435u0442u0441u00a0 zone u0432u0437u0430u0438u043cu043eu0434u0435u0439u0441u0442u0432u0438u00a0 with radiation, as well as the falling u0438u0437u043bu0443u0447u0435u043du0438u00a0 u0443u0441u0442u0430u043du0430u0432u043bu0438u0432u0430u0435u0442u0441u00a0 u0444u044du0443 11, which directly u0438u0437u043cu0435u0440u00a0u0435u0442 u0438u043du0442u0435u043du0441u0438u0432u043du043eu0441 you're falling u0438u0437u043bu0443u0447u0435u043du0438u00a0.on the dependence of the intensity of the reflected u0434u0438u0444u0444u0443u0437u043du043e - u0438u0437u043bu0443u0447u0435u043du0438u00a0 steering angle piece 26 and the intensity of incident u0438u0437u043bu0443u0447u0435u043du0438u00a0 u0440u0430u0441u0441u0447u0438u0442u044bu0432u0430u0435u0442u0441u00a0 u044du043du0435u0440u0433u0435u0442u0438u0447u0435u0441u043au0430u00a0 u0441u043fu0435u043au0442 u0440u0430u043bu044cu043du0430u00a0 density of roughness, u043au043eu0442u043eu0440u0430u00a0 carries information about static properties at the surface of the sample 26 and u0438u0441u043fu043eu043bu044cu0437u0443u0435u0442u0441u00a0 u0434u043bu00a0 calculation with the help of know the ratio of the parameters of the roughness.a sample of 26 u0432u043eu0437u0432u0440u0430u0449u0430u0435u0442u0441u00a0 at the previous position, u043eu0441u0443u0449u0435u0441u0442u0432u043bu00a0u0435u0442u0441u00a0 sequential scan its surface with given step diameter and on the corner. each fixed point sample 26 u043fu043eu0432u0442u043eu0440u00a0u044eu0442u0441u00a0 operations u0441u043du00a0u0442u0438u044e spectrum differential u0441u0432u0435u0442u043eu0440u0430u0441u0441u0435u00a0u043du0438u00a0. the results u0443u0441u0440u0435u0434u043du00a0u044eu0442u0441u00a0 throughout the surface under examination.u043cu0430u043du0438u043fu0443u043bu00a0u0446u0438u0438 with the sample 26 and u0444u044du0443 11 u043eu0441u0443u0449u0435u0441u0442u0432u043bu00a0u044eu0442u0441u00a0 by appropriate priors on 14, 15, 16 and 17. the management of the process of measurement and processing of the data obtained u043eu0441u0443u0449u0435u0441u0442u0432u043bu00a0u044eu0442u0441u00a0 automatically block 19 u0443u043fu0440u0430u0432u043bu0435u043du0438u00a0 and information processing performed by the computer.direct measurement of the intensity of the u0438u0437u043bu0443u0447u0435u043du0438u00a0 u043fu043eu0437u0432u043eu043bu00a0u0435u0442 avoids the use of the calculation of a mirror u043eu0442u0440u0430u0436u0435u043du0438u00a0, u0437u0430u0432u0438u0441u00a0u0449u0435u0433u043e from p u0430u0440u0430u043cu0435u0442u0440u043eu0432 roughness, and to improve the accuracy of their u043eu043fu0440u0435u0434u0435u043bu0435u043du0438u00a0. u0430u0432u0442u043eu043cu0430u0442u0438u0437u0430u0446u0438u00a0 processes u0438u0437u043cu0435u0440u0435u043du0438u00a0 and calculation of roughness increases productivity u043eu043fu0440u0435u0434u0435u043bu0435u043du0438u00a0 these parameters. 2).