3D surface roughness evaluation apparatus, 3D surface roughness evaluation method, 3D surface roughness data acquisition apparatus, and 3D surface roughness data acquisition method

摘要

Acquired by a two-dimensional laser displacement meter, a moving mechanism that moves the two-dimensional laser displacement meter in the X-axis direction, a moving distance reader that reads the moving distance of the two-dimensional laser displacement meter in the X-axis direction, and a two-dimensional laser displacement meter A three-dimensional surface roughness evaluation apparatus comprising: an arithmetic unit that generates measurement target three-dimensional surface roughness data based on the displacement data obtained and the movement distance data acquired by the movement distance reader; The two-dimensional laser displacement meter is arranged so that the width direction of the two-dimensional laser displacement meter coincides with the Y-axis direction so that the displacement data of the coordinate in the Y-axis direction can be read at regular intervals. The displacement width of the displacement meter is at least twice the average length RSm of the element to be measured, and the arithmetic unit is a displacement acquired by the two-dimensional laser displacement meter at regular intervals in the X-axis direction. Data is averaged in the Y-axis direction to generate reference plane data for each coordinate, and the reference plane data for each coordinate is subtracted from the displacement data for each XY plane coordinate to obtain a three-dimensional surface to be measured. It is configured to generate roughness data.