Scanning electron microscope with synchronous back-scattered detection - consisting of retro-filled module flange mounted to side port of microscope having scintillator and fibre-optics system

摘要

In a scanning electron microscope having a single channel or multichannel scintillator with a central passage for the electron beam, a light guide system leading to external measurement and evaluation electronics, and a computer, the novelty comprises a retro-fitted module which is flange-mounted to a side port (4) of the microscope and which has (i) a scintillator (6) in the form of a flat disc of minimal thickness (d) located above the specimen (3), the disc top face (11) having max. optical transmissivity and the disc bottom face (9) and side edges (8) having max. reflectivity and (ii) a fibre-optics system which is coupled to the disc top face (11) for transmission, through the port (4), of light pulses generated by back-scattered electrons in the scintillator (6) and which consists of one or more light guides (7) sealed vacuum-tight by a flange (12). ADVANTAGE - The retro-fitted module allows simultaneous and synchronous back-scattered electron detection without affecting the scanning electron detector operation and allows stereoscopic back-scattered electron imaging and rapid video-frequency imaging without disturbing the internal structure of a conventional scanning electron microscope.