Viewing and photographing optics flat object - has beam splitter between object and illuminating unit or imaging lens to deflect imaging beam path

摘要

The optics comprise an illuminating unit for the object (1), an imaging lens (4) producing an image of the object at the imaging plane (6) and a beam splitter (5) that separates the illuminating and imaging beam paths. The illuminating unit consists of a light source (2) and a condenser lens (3). The beam splitter is a surface mirror. A second mirror (7) deflects the imaging beam path so that it runs in parallel with the illuminating beam path to give a non-reversed and practically non-distorted image. An absorber unit (8) is provided in the section of the illuminating beam path that is deflected by the beam splitter. The absorber unit has an inclined grey filter and a matt black surface. USE/ADVANTAGE - Enlarged photographs of semiconductor chips. High image quality with low aberrations and without interfering reflections or shadows.