Unit for detecting micromagnetic or microelectric fields of object - uses electron microscope in vacuum chamber of which electron beam is led through magnetic field of object being measured

摘要

A read out part evaluates and represents the intensity distribution of the electron beam deflected in the magnetic field of the object being measured. A two dimensional position rseponsive photo diode (20) is provided for the read out part, which is exposed directly to the deflected electron beam (6') in the vacuum chamber (4) of the electron microscope part (3).4 The photo diode has two mutually parallel p or n doped layers (21,22), the detection regions (23,27) of which subjected to the deflected electron beam, respectively extend between the two parallel strip electrodes (25a,25b or 26a,26b) one under the other, whereby the electrodes (25a,25b) of the p layer (21) are aligned vertical in relation to the electrodes (26a,26b) of the n layer (22). USE/ADVANTAGE - Detection unit for measuring micromagnetic or microelectric fields leaving magnetic field producing object to be measured. Facilitates quick two or three dimensional measurement using electron beam of electron microscope thus limiting appts. cost.