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Semiconductor accelerometer - including weight support bracket of triangular or pentagonal cross=section
Semiconductor accelerometer - including weight support bracket of triangular or pentagonal cross=section
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机译:半导体加速度计-包括横截面为三角形或五边形的配重支架
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摘要
A semiconductor accelerometer has a frame formed by a silicon semiconductor substrate (101) in which are formed a weight (102), which is surrounded by and spaced (103) from the substrate, and a silicon support bracket (104), which connects the weight to the substrate. The novelty is that (i) a deformation measuring element (25) is formed in the surface region near the bracket attachment region; and (ii) the silicon support bracket (104) has either a triangular cross-section, defined by a (100) surface and two (111) surfaces, or a pentagonal cross-section, defined by a (100) surface, two (110) surfaces and two (111) surfaces. ADVANTAGE - The accelerometer has improved precision, sensitivity and strength and is simple to produce at low cost and with high productivity.
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