首页>
外国专利>
Semiconductor accelerometer having a cantilevered beam with a triangular or pentagonal cross section
Semiconductor accelerometer having a cantilevered beam with a triangular or pentagonal cross section
展开▼
机译:半导体加速度计,其悬臂梁的横截面为三角形或五边形
展开▼
页面导航
摘要
著录项
相似文献
摘要
A semiconductor accelerometer, including a weight and a cantilevered beam formed in a silicon semiconductor substrate as a frame having a (100) surface, and a strain sensing device formed in a surface portion near a support portion of the cantilevered beam, the silicon cantilevered beam having a triangular cross section defined by one (100) surface and two (111) surfaces or a pentagonal cross section defined by one (100) surface, two (110) surfaces and two (111) surfaces. A method for producing the semiconductor accelerometer is also disclosed.
展开▼