A method for the production of (lambda) / 4 - phase-shifted diffraction grating.

摘要

the invention concerns a process for the production of a / 4 phasenverschobenen beugungsgitters.this method comprises the following steps: application of a bildumkehrresists (2) on a substrate (1) on which the beugungsgitter is to be formed, and the implementation of a interferenzbelichtung, develop the bildumkehrresists (2) in an area of the substrate (1), a first pattern of interferenzbelichtung to receivedevelop the bildumkehrresists (2) in the remaining area of the substrate (1) by a umkehrprozeu00df of bildumkehrresists (2), a second pattern to obtain a first pattern of the umkehrmuster interferenzbelichtung, and transfer the first and second pattern in the substr at (1).