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Negative-working radiation-sensitive mixture with polymer having 1,2,3- thiadiazole groups, and recording material produced therefrom
Negative-working radiation-sensitive mixture with polymer having 1,2,3- thiadiazole groups, and recording material produced therefrom
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机译:具有1,2,3-噻二唑基团的聚合物的负性辐射敏感混合物,以及由此制得的记录材料
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摘要
A negative-working radiation-sensitive mixture comprising a binder and a polymer containing 1,2,3-thiadiazole groups is disclosed. The binder is a polyfunctional compound having functional groups that react with ketene. The polymer is a compound obtained by polymerization of a compound of the general formula I ##STR1## in which R is a polymerizable group. If the polymer is a copolymer containing comonomers having functional groups capable of reacting with ketene, the binder can be omitted. The negative- working radiation-sensitive mixture is particularly suitable for UV, electron beam and X-ray lithography.
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