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Low temperature chemical vapor deposition method for forming tungsten and tungsten carbide

机译:形成钨和碳化钨的低温化学气相沉积方法

摘要

An improved highly erosive and abrasive wear resistant multi- layered coating system on a substrate which provides protection against impact of large particles is disclosed comprising a plurality of composite layers. In each of the composite layers, the first layer closest to the substrate comprises tungsten of sufficient thickness to confer substantial erosion and abrasion wear resistance characteristics to the coating system and a second layer deposited on the first layer comprises a mixture of tungsten and tungsten carbide and the tungsten carbide comprises W.sub.2 C, W.sub. 3 C, or a mixture of both. Because the resulting coating system has enhanced high cycle fatigue strength over the substrate, the coating system is especially useful on such structures as turbine blades and similar articles of manufacture where such chemical vapor depositing the first and second layers at a temperature in the range of about 300° to about 550° C. and then repeating the chemical vapor deposition steps to achieve the multi- layered coating system such that the overall thickness of the system is at least about 20 &mgr;m.
机译:公开了一种在基材上的改进的高度侵蚀性和耐磨性的多层涂层系统,其提供保护免受大颗粒的冲击,其包括多个复合层。在每个复合层中,最接近基材的第一层包含足够厚度的钨,以赋予涂层系统充分的耐腐蚀和耐磨性,第二层沉积在第一层上,包含钨和碳化钨的混合物,以及碳化钨包括W 2 C,W。 3 C,或两者的混合物。因为所形成的涂层系统在基材上具有增强的高循环疲劳强度,所以该涂层系统特别适用于诸如涡轮机叶片和类似制品的结构,其中此类化学气相沉积第一层和第二层的温度为约200℃。 300℃至约550℃,然后重复化学气相沉积步骤以获得多层涂层系统,使得系统的总厚度为至少约20μm。

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