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X-ray mask support member, X-ray mask, and X-ray exposure process using the X-ray mask
X-ray mask support member, X-ray mask, and X-ray exposure process using the X-ray mask
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机译:X射线掩模支撑构件,X射线掩模以及使用X射线掩模的X射线曝光工艺
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摘要
An X-ray mask support member comprises a support frame, and a support membrane which is held thereon and comprises X-ray-transmissive membranes laminated in multiple layers. The support membrane comprises and holds between the multi-layers at least one layer of a transmissive membrane T having an electrical resistivity of 1×10.sup.-4 &OHgr; ·cm or less.
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