X-ray mask support member, X-ray mask, and X-ray exposure process using the X-ray mask

摘要

An X-ray mask support member comprises a support frame, and a support membrane which is held which is thereon and comprises X-ray-transmissive membranes laminated in multi-layers. The support membrane comprises and holds between the multi-layers at least one layer of a transmissive membrane T having an electrical resistivity of 1 x 10⁻⁴ Ω·cm or less.