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Phase-stepping interferometry

机译:相位步进干涉法

摘要

An interferometric procedure, such as electronic speckle pattern interferometry, involves generating two signals representing the point-by- point variations in intensity of respective patterns of electromagnetic radiation resulting from the interference of first and second beams of such radiation derived from a coherent source, with at least the first beam from each pattern being scattered, before interference with its respective second beam, from a common object surface, and with a corresponding pair of the beams, one for each pattern, having a predetermined relative phase difference of other than a multiple of &pgr;; and determining from the two signals values for a datum phase of the radiation at the object surface. Preferably, as a preliminary to this last determination. DC components are removed from the two signals. Conveniently, to simplify the determination, the phase difference is an odd multiple of &pgr;/4 or &pgr;/2.
机译:干涉测量程序,例如电子散斑图干涉测量法,涉及产生两个信号,该两个信号表示由于从相干源得到的这种辐射的第一和第二光束的干扰而导致的电磁辐射的各个方向图的强度逐点变化。至少来自每个图案的第一光束在与其各自的第二光束干涉之前,从公共物体表面和对应的一对光束被散射,每个光束具有一个预定的相对相位差,而不是倍数。的&pgr ;;从两个信号中确定物体表面辐射的基准相位值。优选地,作为该最后确定的前提。直流分量从两个信号中去除。方便地,为了简化确定,相位差是/ 4或/ 2的奇数倍。

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