EXTRALOW-SPEED DRIVING DEVICE FOR PRECISE POSITIONING TABLE

摘要

PURPOSE:To obtain a high precision by providing a target pulse generating means, a servo mechanism, and a table and generating second and following target pulses at prescribed intervals after generation of a first target pulse outputted from the target pulse generating means. CONSTITUTION:A target pulse sending interval designating circuit 8 consists of a target pulse CPU 9, a target pulse storage circuit 10, and a target pulse designating interface 14, and a target value and position information are inputted through cable receivers 12 and 12 connected to terminals 8a and 8b and a data bus 11. An interval designating pulse P0 which designates the intervals of position target pulses P sent from a target pulse generating means 2 is sent to the means 2 through a cable driver 13, the interface 14, and a terminal 8c. The circuit 10 is provided with a target pulse designating program INDEXC and a register memory REG. The program INDEXC uses the memory REG to execute the sequence. When the program INDEXC is executed, the number of position target pulses P and a number I of interpolations in a target section are stored in a position target pulse number register PR and an interpolation number register IR respectively by an initializing subroutine F1, and numerical values in a present section register iR and a zero return register KR are set to zero.