THIN FILM RESISTANCE HEATER, ITS MANUFACTURE, INK JET RECORDING HEAD USING THE SAME THIN FILM RESISTANCE HEATER AND INK JET RECORDING DEVICE

摘要

PURPOSE:To obtain procedures for manufacturing a thin film resistance heater which has no defect in a protecting layer near a heat generation pat and does not allow generation of cracks of cracks in the protecting layer, and a manufacturing method of said heater by providing a process to form an insulating layer, and a protecting layer of electricity insulation in such a manner that a resistor having no stopped part between the top of the insulating layer and itself and a part where a conductor layer is exposed. CONSTITUTION:For the manufacture of a thin film resistance heater, first an insulating layer 2 is formed on a base 1 in the form of a film and a groove hole part where a resistor layer 3 is provided is formed on the top of the insulating layer 2. Next, a film of the same composition as the resistance layer is piled on the insulating layer 2 and the film is removed excepting the groove hole part with the resistor layer 3 formed. In this case, the top of the insulating layer 2 is connected smoothly to the top of the resistor layer 3 so that no stopped part is longer present between both. Then a film of the same composition as a conductor layer 4 and then a film on a part other than a part for the conductor layer 4 is removed to form the conductor layer 4. Finally a protecting layer 5 is formed and as a result, a heat generating part 6 becomes hot. Subsequently, a stress is applied to a part near the heat generating layer as no defect is present in the layer 5.