X-RAY IRRADIATION DEVICE AND X-RAY INTENSITY DISTRIBUTION CORRECTING FILTER

摘要

PURPOSE:To improve pattern width accuracy within an exposure zone by inserting, between an X-ray generating part and a part to be irradiated, an X-ray intensity distribution correcting filter, constituted of membranes of which thickness or X-ray permeability is different from each other so as to make the distribution of X-ray strength at the part to be irradiated be uniform. CONSTITUTION:An X-ray intensity distribution adjustment filter 3 constituted of membranes of which X-ray permeability or thickness is different from each other so as to make the distribution of X-ray strength be uniform, is arranged between an X-ray generating part and a part to be irradiated. The distribution adjustment filter 3 of X-ray strength is constituted of an inorganic membrane (SiN, SiC, BN and so on), an organic membrane (a polyimide, a polypropyrene, a polyester, etc.) and a metallic membrane (Be, Ti, Al, etc.), all of which have different thickness distribution, or otherwise is constituted of inorganic, organic, metallic metallic membranes, etc., having different thickness distribution on a thin membrane base plate 13 which consists of the inorganic, the organic, the metallic membranes, etc.