MONOLITHIC ARRAY ANTENNA MODULE FOR MICROWAVE/ MILLIMETER WAVE

摘要

PURPOSE:To improve the antenna efficiency and to prevent the deterioration in the reliability by forming an antenna element with a low dielectric constant dielectric film such as polyimide and connecting directly a semiconductor element dissipating heat to an electrode pattern on an insulator with a large heat conductivity such as a metallic block. CONSTITUTION:A hetero junction bipolar transistor comprising a collector layer 7 made of n-channel GaAs, a base layer 9 made of a P+ GaAs and an emitter layer 8 made of n-channel AlGaAs is provided on the rear side of a semiconductor GaAs substrate 1. Then a collector circuit 16 is connected to a microstrip matching circuit 15 and also to a patch antenna 14 on a polyimide film. Thus, an active element dissipating heat is formed on the rear side of the chip so as to be connected directly to a grounding body with excellent heat conductivity and the antenna element is formed on the polyimide film, then the antenna efficiency is improved. Since the matching circuit 15 and the collector circuit 36 are formed into microstrip circuits using a GaAs whose wavelength reduction rate is high as the substrate, the miniaturization is attained.