FIELD ION MICROSCOPE AND SCANNING TUNNELING MICROSCOPE

摘要

PURPOSE:To obtain a field ion microscope capable of reducing the applied quantity of image focusing gas, and a field ion microscope combined type scanning tunneling microscope capable of performing rapid regression into ultra-high vacuum. CONSTITUTION:A gas nozzle 109 for supplying image focusing gas only to the tip part of a sample chip disposed in a vacuum drum 103 is disposed facing the tip part of the sample chip 101. Inside the vacuum drum, there are also provided a scanning tunneling microscope body, an arm for holding the sample, an arm drive unit, a device for driving the screen of an electrolytic ion microscope, a gas nozzle for supplying image focusing gas from an image focusing gas supply device only to the tip part of a probe chip, and an exhaust device for obtaining ultra-high vacuum.