EMISSION SPECTRAL ANALYSIS AND DEVICE THEREFOR

摘要

PURPOSE:To obtain the emission spectral analysis method and device there for which can analyze the constituents having each low concentration with high precision and high reproducibility. CONSTITUTION:An emission spectral analysis device is equipped with a fluid flow passage 5 for the flow of the fluid for cooling or heating a sample 3, gas introducing passage 6 for introducing the gas flown onto the sample 3, and a temperature measuring device 9 for measuring the temperature of the sample 3. The sample 3 held on a holding body 1 is cooled or heated, and after the rise of the temperature to a necessary temperature is confirmed by a temperature measuring device 9, electric discharge is carried out between the sample 3 and a counter electrode 7, and the spectral analysis for the light obtained through electric discharge is carried out.