METHOD AND DEVICE FOR TREATING MICROSCOPIC PART, AND METHOD AND DEVICE FOR ANALYSING MICROSCOPIC PART

摘要

PURPOSE:To detect and correct defective patterns on the surfaces or insides of elements or substrates, and detect and analyze foreign substances at a space resolving power of 20nm or shorter by joining together a near optical scanning microscope (NSOM) and a scanning tunnel microscope (STEM). CONSTITUTION:The output 110 of a light source 109 such as a laser which has penetrated an intermediate optical system 111 and focused by a lens 108 is introduced to a MOS chip 107 with a narrow opening part them after it penetrates a sample 101 and is focused at a focus lense 115, it enters a detector 116. The microscopic part of the sample 101 is detected by a NOSM and the chip 107 having a microscopic projection 206 thereon, while atoms at its tip approaches those on the surface of the sample 101 to a distance of about 2nm and flows a tunnel current at an applied voltage of several volts, functioning as STM. The function gives a process, a film, T = -n, etc., to the microscopic part, enabling the detection and correction of defective patterns, and the analysis of foreign substances, etc., at an atmospheric resolving power of 20 mum or shorter.