Resistance measurements on semiconductor element - involving holding element and conductor at constant distance in order to bring contact resistance to predetermined value

摘要

The resistance or conductivity between two or more conductors which are placed against a semiconductor element is measured. In order to bring the contact resistance between the conductors and the element to and hold it at a predetermined value during measuring, the conductors are held at a constant distance and/or under constant pressure relative to the semiconductor element. The measurement takes place according to the Spreading Resistance Probe (SRP) technique. A tungsten thread of 20 micron diameter on which a point has been cut is used. A force is applied between the element and the conductor such that the element penetrates through the layer of natural oxide on the element. @(4pp Dwg.No.0/0).