Polymers contg. N-tert.-butyl maleimide units and opt. comonomer(s) - having high transparency, used as base polymers in sensitive resist systems

摘要

Polymers comprise N-tert.-butyl maleinimide monomeric units. Also claimed is the prepn. of the polymers by polymerising, pref. radically N-tert.-butyl maleinimide and opt. further monomer(s) in an organic solvent and isolating the polymer. Copolymers of N-t.-butyl maleinimide with styrene and terpolymer with styrene and maleic anhydride or maleic anhydride and allyl trimethylsilane are specifically claimed. USE/ADVANTAGE - The polymers can be used as base polymers in highly sensitive resist systems. They have high transparency and are used in high contrast DUV photoresistor, e.g., for irradiation with krf excimer laser irradiation appts. (of wavelength 248nm)