Suppression circuit for arc discharge effects in reactive high rate DC atomisation - with high frequency inductance between current supply and plasmatron

摘要

Suppression circuit for arc discharge effects in reactive high rate DC atomisation, which is placed between the current supply and a plasmatron in the form of a high frequency inductance. The circuit pref. consists of at least one coil with soft magnetic ferrite core with an inductance in the mH range. USE/ADVANTAGE - Used in thin film deposition technology, e.g. the deposition of oxide layers in the mfr. of write-read heads, for suppression of arc discharge effects on high rate DC atomisation.