thermostatisierte arrangement for safe and controlled evaporation of the air toxic or highly reactive liquid reaktionsmedien, preferably for niederdruckdampfabscheideanlagen in semiconductor technology.

摘要

A thermostatic vaporiser device for the safe and controlled vaporisation of liquid reaction media which are toxic and/or highly reactive in air, especially for low-pressure vapour discharge systems in semiconductor technology, is characterised in that the carrier gas inlet valves (3, 5) and outlet valves (4, 6) fitted in the cover (2) can be shut off and have different standard sizes, that moreover a valve (11) and/or a filling branch for filling the vaporiser (1) and for a level indicator (12) are provided in the cover (2), a measurement system (12) for indicating the level being integrated in the cover (2). The vaporiser device is preferably used in circuit board chemical vapour deposition units for the deposition of doped and undoped insulation layers and contact metal layers and for etching processes. As compared with the commercially available vaporiser vessels, it is distinguished by higher safety and better control of the vaporisation. IMAGE