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Radiation absorber comprising a CVD diamond film having special surface characteristics

机译:包括具有特殊表面特性的CVD金刚石膜的辐射吸收器

摘要

A radiation absorber comprising a CVD diamond film (16) (24) having at least one of the following characteristics: (a) a surface (18) adapted to be exposed to the radiation and having a roughened or patterned profile so as to trap incident radiation by multiple reflections; (b) a surface (26), bulk texture and grain size such that it is highly absorbent to the radiation by virtue of internal scatterings and multiple reflections. In (a) the diamond film will replicate the surface of the substrate on which it is deposited. The substrate may thereafter be removed, for example, by chemical etching. The substrate may be silicon, silicon nitride, tungsten carbide, sialon, silicon carbide, a diamond compact, molybdenum, copper, titanium, or tungsten. IMAGE
机译:一种辐射吸收器,包括具有以下特征中的至少一个的CVD金刚石膜(16)(24):(a)表面(18),其适于暴露于辐射并且具有粗糙的或图案化的轮廓以便捕获入射光多次反射辐射; (b)表面(26),整体结构和晶粒尺寸,以使其由于内部散射和多次反射而对辐射高度吸收。在(a)中,金刚石膜将复制其上沉积有金刚石的基底的表面。此后可以例如通过化学蚀刻去除衬底。衬底可以是硅,氮化硅,碳化钨,硅铝氧氮合金,碳化硅,金刚石压块,钼,铜,钛或钨。 <图像>

著录项

  • 公开/公告号GB2253416A

    专利类型

  • 公开/公告日1992-09-09

    原文格式PDF

  • 申请/专利权人 * DE BEERS INDUSTRIAL DIAMOND DIVISION;

    申请/专利号GB19920003813

  • 发明设计人 RICARDO SIMON * SUSSMAN;

    申请日1992-02-21

  • 分类号C23C16/01;C23C16/02;C23C16/26;C23C16/27;G01J5/08;

  • 国家 GB

  • 入库时间 2022-08-22 05:24:17

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