首页> 外国专利> Measurement of ultrafine particle size distributions

Measurement of ultrafine particle size distributions

机译:测量超细粒度分布

摘要

A measurement system for microelectronic clean rooms to measure ultrafine particle size distribution in the range of 0.002 to 0.2 micrometers is provided which includes four screen diffusion stages each connected in series with a condensation nucleus detector. The input to each screen diffusion stage is connected to a localized area to be measured, and the output of each condensation nucleus detector is connected to a vacuum system which simultaneously draws particle bearing air through the four channels. The output signals of the condensation nucleus detectors present particle size distributiion. In one embodiment of the present invention, one or more optical particle detectors are connected in parallel with the diffusion stage-condensation nucleus detectors to expand the distribution measurements to larger sizes. Other embodiments inclulde a manifold probe to probe a localized area, an alarm system actuated when particle levels exceed a predetermined level, and a manifold assembly to minimize vacuum lines passing through the walls of the microelectronic clean room.
机译:提供了一种用于微电子洁净室的测量系统,用于测量0.002至0.2微米范围内的超细粒度分布,该系统包括四个筛分扩散级,每个筛级扩散级均与缩合核检测器串联连接。每个屏幕扩散级的输入连接到要测量的局部区域,每个凝结核检测器的输出连接到真空系统,该真空系统同时通过四个通道抽吸含颗粒空气。凝聚核检测器的输出信号呈现粒径分布。在本发明的一个实施例中,一个或多个光学粒子检测器与扩散级-凝聚核检测器并联连接,以将分布测量结果扩展到更大的尺寸。其他实施例包括歧管探针以探测局部区域,当颗粒水平超过预定水平时启动警报系统,以及歧管组件以最小化通过微电子洁净室的壁的真空线。

著录项

  • 公开/公告号US5072626A

    专利类型

  • 公开/公告日1991-12-17

    原文格式PDF

  • 申请/专利权人 RESEARCH TRIANGLE INSTITUTE;

    申请/专利号US19890379826

  • 发明设计人 GILMORE J. SEM;DAVID S. ENSOR;

    申请日1989-07-14

  • 分类号G01N1/00;

  • 国家 US

  • 入库时间 2022-08-22 05:23:39

相似文献

  • 专利
  • 外文文献
  • 中文文献
获取专利

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号