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Laser, direct-write integrated circuit production system
Laser, direct-write integrated circuit production system
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机译:激光直写集成电路生产系统
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摘要
A laser, direct-write system for making personalized custom or semi- custom integrated circuits with a very fast turnaround time. The system includes a method and apparatus for high percision scanning of a submicron laser spot. The laser beam is scanned at the entrance of a beam expander. The beam expander reduces the scan angle and error produced by a mechanical scanning device such as a rotating polygonal mirror. The smaller scan angle at the output of the beam expander matches well with the projection optics of a laser, direct-write semi-custom integrated circuit production system. The scan error reduction permits more accurate positioning of the focussed laser spot on the surface of the semi-custom integrated circuit.
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