MANUFACTURE OF POLYSILANES AND POLYGERMANES AND VAPOR DEPOSITION OF HYDROGENATED AMORPHOUS SILICON, ALLOY OF SAME AND HYDROGENATED AMORPHOUS GERMANIUM

摘要

A process is provided for forming high purity polysilanes or polygermanes by electric discharge wherein the monosilane or monogermane is provided in a gaseous mixture with a carrier gas at atmospheric pressure. The polysilanes or polygermanes produced at atmospheric pressure are further deposited by various means onto a substrate as hydrogenated amorphous silicon or germanium. The polysilane may also be used for the deposition of hydrogenated amorphous silicon alloys.