DIFFERENTIAL PRESSURE SENSOR AND COMPOSITE FUNCTION TYPE DIFFERENTIAL PRESSURE SENSOR

摘要

PURPOSE:To reduce the zero point change and span change of a differential pressure detection means at the time of the application of static pressure and to facilitate highly accurate manufacturing in a differential pressure sensor and a composite function type differential pressure sensor. CONSTITUTION:A semiconductor chip 1 having a differential pressure detection means, a static pressure detection means and a temp. detection means and the bonding part 21 bonded to the thick-walled part of the semiconductor chip 1 are provided. The thickness of the bonding part 21 is made equal to or less than that of the semiconductor chip 1 and a composite function type differential pressure sensor is constituted of the fixing stand 2 having at least one or more thin-walled part within the diameter of the pressure-sensitive diaphragm of the semiconductor chip 1 and the housing 4 bonded to the fixing stand.