METHOD FOR STRAIGHTENING JOINED BODY OF SPUTTERING TARGET AND BACKING PLATE AND SPUTTERING TARGET MATERIAL

摘要

PURPOSE: To straighten the shape of a target without generating cracks or the like by joining a Cr series sputtering target to a backing plate made of Cr or stainless steel by a brazing filler metal having a specified m.p., heating it to a specified temp. and straightening its shape. ;CONSTITUTION: At the time of joining a frittle metallic sputtering target 1 made of a Cr alloy contg. 70wt.% Cu or pure Cr with a backing plate made of Cu or stainless steel, an alloy such as Ge-Al base alloy having ≥400°C m.p. is interposed between the target 1 and the backing plate as a brazing filler metal, and heated at 400°C to the m.p. of the joined body or below in a vacuum furnace to form a sputtering target having warpage. Next, cooling is executed while the joined body is cramped on a straightening jig 3 in such a manner that the recessed part of the joined body turns downward, and its warpage is straightened without generating cracks, by which the objective sputtering target of a flat shape constituted of the target 1 and the backing plate 2 can be manufactured.;COPYRIGHT: (C)1993,JPO&Japio