SCANNING-MICROSCOPE PROBE, DISPLACEMENT DETECTING METHOD FOR SCANNING-MICROSCOPE PROBE AND SCANNING MICROSCOPE

摘要

PURPOSE: To make an apparatus compact by providing a coil part, wherein conductive material is arranged in a loop shape, at a flexible plate part, which gives the instructions to a needle-shaped chip. ;CONSTITUTION: A needle-shaped chip 1 is provided at the lower surface of one end of a flexible plate 2. A coil is formed on the upper surface of the plate. A probe is set on a probe holder 52 so that the surface direction of the plate 2 agrees with the magnetic field of a permanent magnet 45. At the same time, the coil is connected to an amplifier 48 through a contact point 59 and a signal wiring 53. When the probe is excited in the direction Z with a piezoelectric element 46, the coil is vibrated in the magnetic field, and the AC-induced output is obtained from the amplifier 48. When the chip 1 is brought close to a sample at this time, the vibration of the plate 2 is changed with interatomic force. A control circuit 49 applies negative feedback so as to make the output amplitude of the amplifier 48 constant, and the distance between the chip 1 and the sample 58 is kept constant. The probe is made to scan in the X-Y directions with the piezoelectric element 47, and the moving amount of the element 46 in the direction Z is outputted. Thus, the two-dimensional irregular image of the sample 58 is obtained.;COPYRIGHT: (C)1993,JPO&Japio